Flexible Electronics News

Laser Thermal Anneal to Boost Performance of 3D Memory Devices

Technique provides a way to higher stacking, higher bit density in 3D memory

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By: DAVID SAVASTANO

Editor, Ink World Magazine

Nanoelectronics research center imec and Excico, a global leader in semiconductor laser annealing, have successfully demonstrated the application of laser thermal anneal (LTA) to boost the current in vertical polysilicon channel devices for 3D memory. Due to the larger grain size of the laser recrystallized polycrystalline channel material, up to 10 times higher read current and 2.5 times steeper sub-threshold slope could be obtained as compared to conventional polysilicon channel. This techniqu...

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